Effect of Photoillumination on Gold-Nanoparticle-Assisted Chemical Etching of Silicon
نویسندگان
چکیده
منابع مشابه
Fabrication of porous silicon by metal-assisted etching using highly ordered gold nanoparticle arrays
A simple method for the fabrication of porous silicon (Si) by metal-assisted etching was developed using gold nanoparticles as catalytic sites. The etching masks were prepared by spin-coating of colloidal gold nanoparticles onto Si. An appropriate functionalization of the gold nanoparticle surface prior to the deposition step enabled the formation of quasi-hexagonally ordered arrays by self-ass...
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ژورنال
عنوان ژورنال: Journal of Nanomaterials
سال: 2018
ISSN: 1687-4110,1687-4129
DOI: 10.1155/2018/5479605